T. A. Pomorski

Defects and electronic transport in hydrogenated amorphous SiC films of interest for low dielectric constant back end of the line dielectric systems

Patrick M. Lenahan, Corey J. Cochrane, Sean W. King, 2013 .

An Electron Paramagnetic Resonance Study of Defects in Interlayer Dielectrics

Patrick M. Lenahan, Sean W. King, S. King, 2011 .

Defect structure and electronic properties of SiOC:H films used for back end of line dielectrics

Patrick M. Lenahan, Sean W. King, J. Bielefeld, 2014 .