T. W. Lin

Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features

Gavin P. Horn, Harley T Johnson, H. Johnson, 2012 .

Anisothermal Anodic Bonding: A Method to Control Global Curvature and Residual Stress

Gavin P. Horn, Harley T Johnson, T. W. Lin, 2010 .