J.S. Villarrubia

Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library.

R. J. Kline, J. Villarrubia, A. Vladár, 2015, Ultramicroscopy.

Metrology standards for advanced semiconductor lithography referenced to atomic spacings and geometry

M.W. Cresswell, L.W. Linholm, J.S. Villarrubia, 1993, ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures.