Mingzi Lu

Nanometric lateral scale development with Si/SiO2 multilayer thin-film structures and improvement of uncertainty evaluation using analysis of variance

Ichiko Misumi, Satoshi Gonda, Hideyuki Tanaka, 2008 .

Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2010 .