I. De

Investigation of Detection Limits of Resistive Contact Plugs in Electron Beam Inspection Using Modeling and Simulation

G. Zapalac, G. Zapalac, I. De, 2007, IEEE Transactions on Semiconductor Manufacturing.

Analytic models for the kinetics of generating a voltage contrast signal from contact plugs used in integrated circuits

I. De, K. Shadman, K. Shadman, 2007 .