Naoki Tanahashi

The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology

Tadahiro Ohmi, Hidekazu Ishii, Yasuyuki Shirai, 2005 .

A treatment of carbonaceous wastes using thermal plasma with steam

Manabu Tanaka, Hiroshi Nishikawa, Tadashi Takemoto, 2004 .