Lance Oh

Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter Arrays

Samuel Harvey Moseley, Nick Costen, Alexander S. Kutyrev, 2018 .

Fabrication of MEMS Microshutter Arrays for Cryogenic Applications

Mary J. Li, Daniel P. Kelly, Todd King, 2006 .

Fabrication of folding microstructures actuated by polypyrrole/gold bilayer

E. Smela, B. Shapiro, B. Shapiro, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).