Kumi Motai

Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror

Iwao Nishiyama, Akira Izumi, Hiroaki Oizumi, 2007, SPIE Advanced Lithography.

FI-STM study of metal surfaces(Abstracts of Doctoral Dissertations,Annual Report (from April 1994 to March 1995))

Kumi Motai, 1995 .

Impact of multi-layer deposition method on defects for EUVL photomask blanks

Jerry Cullins, Kumi Motai, Iwao Nisiyama, 2006, SPIE Advanced Lithography.

Analysis of Printability of Scratch Defect on Reflective Mask in Extreme Ultraviolet Lithography

Iwao Nishiyama, Jerry Cullins, Kumi Motai, 2006 .