J. Choi
发表
D. Dornfeld,
Mahboob Alam,
S. Min,
2003
.
Allen H. Gabor,
W. Landers,
N. Lustig,
2008
.
D. Dornfeld,
J. Choi,
2004
.
D. Dornfeld,
J. Choi,
2005,
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005..
Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
E. Engbrecht,
W. Tseng,
S. Molis,
2008
.