Padraig Dunne

发表

Investigating the effects of laser intensity and pulse duration on 6.7-nm BEUV emission from Gadolinium plasma

Bowen Li, Takeshi Higashiguchi, Noboru Yugami, 2012, Other Conferences.

13.5 nm emission from composite targets containing tin

Padraig Dunne, Emma Sokell, Patrick Hayden, 2005, SPIE Advanced Lithography.

Shorter wavelength EUV source around 6.X nm by rare-earth plasma

Takeshi Higashiguchi, Noboru Yugami, Thomas Cummins, 2011, Optical Engineering + Applications.

A 6.7-nm beyond EUV source as a future lithography source

Bowen Li, Takeshi Higashiguchi, Noboru Yugami, 2012, Advanced Lithography.

XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets

Jiri Limpouch, Padraig Dunne, Emma Sokell, 2017, Optics + Optoelectronics.

VUV and soft x-ray emission from pre-plasmas irradiated with intense picosecond and femtosecond pulses

Ciaran L. S. Lewis, Adrian Murphy, Padraig Dunne, 2003, SPIE OPTO-Ireland.

Investigation of EUV sources for 13.5-nm operation

Padraig Dunne, Anthony Cummings, Grainne Duffy, 2003, SPIE OPTO-Ireland.

Soft x-ray narrow-band laser plasma sources for nanotechnology

Padraig Dunne, Ronan Faulkner, Dave O'Reilly, 2000, Other Conferences.

Laser-produced plasma UTA emission in 3-7nm spectral region

Bowen Li, Takeshi Higashiguchi, Noboru Yugami, 2012, Advanced Lithography.

EUV laser produced plasma source development for lithography (Invited Paper)

Padraig Dunne, Gerry O'Sullivan, Patrick Hayden, 2005, SPIE OPTO-Ireland.

Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Toyohiko Yatagai, Takeshi Higashiguchi, Noboru Yugami, 2010, Optical Engineering + Applications.

Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment

A. Cummings, Padraig Dunne, Gerry O'Sullivan, 2005 .

The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm

Bowen Li, Takeshi Higashiguchi, Akira Endo, 2012 .

Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography

Francesco Flora, Luca Mezi, Antonio Ritucci, 2008 .

“Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2013 .

Angular distribution of the ion emission from a tin-based laser-produced plasma extreme ultraviolet source

Padraig Dunne, Emma Sokell, A O'Connor, 2010 .

Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses

Bowen Li, Takeshi Higashiguchi, Padraig Dunne, 2016 .

Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm.

Takeshi Higashiguchi, Masaharu Nishikino, Shigeru Ohta, 2016, The Review of scientific instruments.

Tin based laser-produced plasma source development for EUVL

A. Cummings, Padraig Dunne, Patrick Hayden, 2006 .

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas.

Taisuke Miura, Bowen Li, Tatsuo Okada, 2013, Optics express.

Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody

A. Cummings, Padraig Dunne, Emma Sokell, 2005 .

Density and x-ray emission profile relationships in highly ionized high-Z laser-produced plasmas

Hiroshi Azechi, Chihiro Suzuki, Bowen Li, 2015 .

Feasibility study of broadband efficient ''water window'' source

Bowen Li, Takeshi Higashiguchi, Akira Endo, 2012 .

Opacity of neutral and low ion stages of Sn at the wavelength 13.5 nm used in extreme-ultraviolet lithography

A. Cummings, Padraig Dunne, Gerry O'Sullivan, 2005 .

Optimizing 13.5nm laser-produced tin plasma emission as a function of laser wavelength

Padraig Dunne, Gerry O'Sullivan, G. O'sullivan, 2007 .

Rare-earth plasma extreme ultraviolet sources at 6.5―6.7 nm

Toyohiko Yatagai, Takeshi Higashiguchi, Akira Endo, 2010 .

Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma

Bowen Li, Takeshi Higashiguchi, Akira Endo, 2012 .

13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources

A. Cummings, Padraig Dunne, Gerry O'Sullivan, 2006 .

Variable composition laser-produced Sn plasmas—a study of their time-independent ion distributions

Luke McKinney, A. Cummings, Padraig Dunne, 2004 .

XUV spectra of 2nd transition row elements: identification of 3d–4p and 3d–4f transition arrays

Akira Endo, Jiri Limpouch, Padraig Dunne, 2015 .

Note: development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source.

Bowen Li, Takeshi Higashiguchi, Atsushi Sunahara, 2014, The Review of scientific instruments.

Simplified calculation of nonlocal thermodynamic equilibrium excited state populations contributing to 13.5nm emission in a tin plasma

A. Cummings, Padraig Dunne, Gerry O'Sullivan, 2007 .

Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

Toyohiko Yatagai, Takeshi Higashiguchi, Akira Endo, 2010 .

Soft X-ray emission from molybdenum plasmas generated by dual laser pulses

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2016 .

Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2014 .

Gd plasma source modeling at 6.7 nm for future lithography

Bowen Li, Takeshi Higashiguchi, Akira Endo, 2011 .

Angular emission and self-absorption studies of a tin laser produced plasma extreme ultraviolet source between 10 and 18 nm

Padraig Dunne, Fergal O'Reilly, P. Dunne, 2008 .

Sources for beyond extreme ultraviolet lithography and water window imaging

Chihiro Suzuki, Bowen Li, Takeshi Higashiguchi, 2015 .

A spatio-temporal study of variable composition laser-produced Sn plasmas

A. Cummings, Padraig Dunne, Emma Sokell, 2006 .

Extreme ultraviolet source at 6.7 nm based on a low-density plasma

Bowen Li, Takeshi Higashiguchi, Akira Endo, 2011 .

Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source

Padraig Dunne, Gerry O'Sullivan, P. Dunne, 2000 .

Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application

Toyohiko Yatagai, Takeshi Higashiguchi, Wataru Sasaki, 2010 .

Shorter-wavelength extreme-UV sources below 10nm

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2011 .

Angle-resolved absolute out-of-band radiation studies of a tin-based laser-produced plasma source

Padraig Dunne, V. Bakshi, P. Hayden, 2007 .

Spectral enhancement of a Xe-based EUV discharge plasma source

Francesco Flora, Luca Mezi, Antonio Ritucci, 2009 .