O. Tabata
发表
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
T. Tsuchiya,
Y. Hirai,
K. Tsujimoto,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
W. Peukert,
T. Tsuchiya,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
S. Sedky,
M. Mitwally,
O. Tabata,
2015,
Microsystem Technologies.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2007,
Journal of Microelectromechanical Systems.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
T. Tsuchiya,
K. Sugano,
2015
.
K. Sugano,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Y. Omura,
Y. Nonomura,
O. Tabata,
1997,
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2013,
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
T. Tsuchiya,
T. Tsuchiya,
Y. Taga,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
K. Kamei,
Y. Hirai,
T. Tsuchiya,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
T. Tsuchiya,
Y. Hirai,
A. Uesugi,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Y. Hirai,
T. Tsuchiya,
S. Park,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
H. Sugimura,
T. Tsuchiya,
Y. Hirai,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
K. Sugano,
O. Tabata,
2002,
Proceedings of 2002 International Symposium on Micromechatronics and Human Science.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Akira Ishida,
Osamu Tabata,
Morio Sato,
2007
.