X. Shi
发表
Shoumian Chen,
Yuhang Zhao,
X. Shi,
2020,
2020 China Semiconductor Technology International Conference (CSTIC).
Shoumian Chen,
Yuhang Zhao,
X. Shi,
2020,
2020 International Workshop on Advanced Patterning Solutions (IWAPS).
X. Shi,
Chen Li,
Tao Zhou,
2022,
2022 China Semiconductor Technology International Conference (CSTIC).
Will Conley,
J. Fung Chen,
Stephen D. Hsu,
2004,
SPIE Advanced Lithography.
Stephen Hsu,
Mircea Dusa,
Robert John Socha,
2002,
SPIE Advanced Lithography.
Will Conley,
John S. Petersen,
Robert J. Socha,
1999,
Photomask and Next Generation Lithography Mask Technology.
Will Conley,
Christophe Pierrat,
Robert John Socha,
1999,
Advanced Lithography.
X. Shi,
Chen Li,
Yan Yan,
2022,
Journal of Micro/Nanopatterning, Materials, and Metrology.
Wei Yuan,
Yanjun Xiao,
Ming Li,
2019,
Advanced Lithography.
Xuelong Shi,
Yan Yan,
Wei Yuan,
2021,
Journal of Micro/Nanopatterning, Materials, and Metrology.
X. Shi,
Chen Li,
Yifei Lu,
2020,
2020 International Workshop on Advanced Patterning Solutions (IWAPS).
Stephen D. Hsu,
Robert J. Socha,
Douglas J. Van Den Broeke,
2004,
Photomask Japan.
X. Shi,
Chen Li,
Tao Zhou,
2022,
2022 China Semiconductor Technology International Conference (CSTIC).