Herbert E. Mayer

An Advanced Wafer Stepper For Sub-Micron Fabrication

Herbert E. Mayer, Ernst W. Loebach, 1987, Other Conferences.

Method of positioning disk-shaped workpieces, preferably semiconductor wafers

Herbert E. Mayer, 1983 .

Characterization Data And Cross Matching Of A High Performance Step-And-Repeat Aligner

Herbert E. Mayer, Ernst W. Loebach, 1982, Advanced Lithography.

A New Step-By-Step Aligner For Very Large Scale Integration (VLSI) Production

Herbert E. Mayer, Ernst W. Loebach, 1980, Other Conferences.

Step and Repeat Aligner for VLSI Production

Herbert E. Mayer, A. Wirtz, 1983 .