Rigo Richter

发表

Jo Finders, Eelco van Setten, Mircea Dusa, 2008, SPIE Advanced Lithography.

Eric Poortinga, Rigo Richter, Thomas Scheruebl, 2009, Photomask Technology.

Peter De Bisschop, Vicky Philipsen, Andreas Erdmann, 2007, SPIE Photomask Technology.

Thomas Scherübl, Robert Birkner, Kees Grim, 2008 .

Jo Finders, Eelco van Setten, Mircea Dusa, 2008, European Mask and Lithography Conference.

Peter De Bisschop, Vicky Philipsen, Ute Buttgereit, 2007, SPIE Photomask Technology.

Norbert Rosenkranz, Andrew Ridley, Wolfgang Harnisch, 2006, Photomask Japan.

Jo Finders, Eelco van Setten, Mircea Dusa, 2009, Photomask Japan.

Thomas Scherübl, Robert Birkner, Rigo Richter, 2008, Photomask Japan.

Yasutaka Morikawa, Naoya Hayashi, Takashi Adachi, 2007, SPIE Advanced Lithography.

Eric Poortinga, Rigo Richter, Thomas Schereubl, 2009, Photomask Japan.

Thomas Scheruebl, Ulrich Stroessner, Thomas Thaler, 2009, Photomask Technology.

Hiroyuki Miyashita, Thomas Scheruebl, Ernesto Villa, 2010, Photomask Japan.

Thomas Scherübl, Robert Birkner, Rigo Richter, 2007, European Mask and Lithography Conference.

Thomas Scherübl, Robert Birkner, Rigo Richter, 2008, Photomask Technology.