Peggy Kniffin

Calibration of MEMS capacitive accelerometers using Electrical Stimulus BIST by Naveen Sai Jangala Naga A Thesis Presented in Partial Fulfillment of the Requirements for the Degree Master of Science Approved December 2014 by the Graduate Supervisory Committee: Sule Ozev, Chair

B. Bakkaloglu, S. Kiaei, R. Roop, 2014 .

An Electrical Stimulus based Built In Self Test (BIST) circuit for Capacitive MEMS accelerometer by Vinay Kundur A Thesis Presented in Partial Fulfillment of the Requirements for the Degree Master of Science Approved July 2013 by the Graduate Supervisory Committee:

Chair, B. Bakkaloglu, S. Kiaei, 2013 .