D.D. Cho

Robust SOI process without footing for ultra high-performance microgyroscopes

J. Kim, S. Park, W. Carr, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM process

Jongpal Kim, Sangjun Park, Donghun Kwak, 2005, Journal of Microelectromechanical Systems.