Dieter Schneider

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Helena Ronkainen, Harri Lipsanen, Maria Berdova, 2014 .

Effect of pore structure of nanometer scale porous films on the measured elastic modulus.

Mario Gonzalez, Kris Vanstreels, Patrick Verdonck, 2013, Langmuir : the ACS journal of surfaces and colloids.