L. Economikos
发表
Y. Moon,
R. Venigalla,
A. Kapur,
2006
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J. Sudijono,
H. Zhuang,
J. Wallner,
2011
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W. Tseng,
P. Dehaven,
M. Khojasteh,
2014
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S. Grunow,
N. Lustig,
M. Chudzik,
2013,
IEEE Transactions on Semiconductor Manufacturing.
S. Grunow,
M. Chudzik,
W. Tseng,
2013,
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.
J. Gill,
M. Shinosky,
T. Ema,
2005,
2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..
Allen H. Gabor,
W. Landers,
N. Lustig,
2008
.
Laertis Economikos,
Stephen Greco,
Tamba Gbondo-Tugbawa,
2012,
Thirteenth International Symposium on Quality Electronic Design (ISQED).
L. Economikos,
S. Tsai,
Y. Moon,
2004,
Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729).
L. Economikos,
Jianping Zheng,
J. Muncy,
2012,
2012 SEMI Advanced Semiconductor Manufacturing Conference.
D. Boning,
Brian Lee,
L. Economikos,
2001
.
A. Chakravarti,
R. Conti,
L. Economikos,
2001
.
Carl J. Radens,
L. Economikos,
C. Radens,
2000,
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).
G. Northrop,
V. Sardesai,
S. Narasimha,
2014,
2014 IEEE International Electron Devices Meeting.
L. Nicholson,
T. Standaert,
S. Sankaran,
2011
.
Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
E. Engbrecht,
W. Tseng,
S. Molis,
2008
.
Laertis Economikos,
Craig L. Shoemaker,
Robert S. Brodkey,
1990
.
J. Kim,
L. Economikos,
Sriram Anjur,
2006
.
M. Ieong,
T. Kanarsky,
D. Chidambarrao,
2005,
Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005..