Andra´s E. Vlada´r

Photomask dimensional metrology in the scanning electron microscope, part I: Has anything really changed?

Michael T. Postek, Andra´s E. Vlada´r, Marylyn Hoy Bennett, 2004 .

Photomask dimensional metrology in the scanning electron microscope, part II: High-pressure/environmental scanning electron microscope

Michael T. Postek, Andra´s E. Vlada´r, Marylyn Hoy Bennett, 2004 .