Kazuyoshi Torii

发表

Spatial signature in local overlay measurements: what CD-SEM can tell us and optical measurements can not

Scott Halle, Takumichi Sutani, Atsuko Yamaguchi, 2010, Advanced Lithography.

Reliability issues of silicon LSIs facing 100-nm technology node

Eiji Takeda, Eiichi Murakami, Kenji Hinode, 2002, Microelectron. Reliab..

Concerning the influence of pattern symmetry on CD-SEM local overlay measurements for double patterning of complex shapes

Scott Halle, Takumichi Sutani, Atsuko Yamaguchi, 2010, Advanced Lithography.

CD-SEM metrology of spike detection on sub-40 nm contact holes

Atsuko Yamaguchi, Yoshinori Momonoi, Matthew E. Colburn, 2010, Advanced Lithography.

Hysteretic drain-current behavior due to random telegraph noise in Scaled-down FETs with high-κ/metal-gate stacks

Yu Zhu, Michael A. Guillorn, Wilfried Haensch, 2010, 2010 International Electron Devices Meeting.

Critical dimension scanning electron microscope local overlay measurement and its application for double patterning of complex shapes

Scott Halle, Takumichi Sutani, Atsuko Yamaguchi, 2011 .

Gate-Last MISFET Structures and Process for Characterization of High-k and Metal Gate MISFETs

Takeshi Maeda, Kazuyoshi Torii, Naoki Kasai, 2005, IEICE Trans. Electron..

Improved theory for remote-charge-scattering-limited mobility in metal–oxide–semiconductor transistors

Kazuyoshi Torii, Takahiro Onai, K. Torii, 2002 .

A scalable single-transistor/single-capacitor memory cell structure characterized by an angled-capacitor layout for megabit FeRAMs

Yoshihisa Fujisaki, Kazuyoshi Torii, H. Yamashita, 1998, 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216).

First-principles studies of the intrinsic effect of nitrogen atoms on reduction in gate leakage current through Hf-based high-k dielectrics

Kikuo Yamabe, Kazuyoshi Torii, Kenji Shiraishi, 2005 .

CxFET: A novel steep subthreshold swing CMOS featuring a tunnel-injection bipolar transistor and MOSFET device complex

Eiji Takeda, Digh Hisamoto, Kazuyoshi Torii, 2010, 2010 International Electron Devices Meeting.

Pt/TiN electrodes for stacked memory with polysilicon plug utilizing PZT films

Yoshihisa Fujisaki, Kazuyoshi Torii, Masahiko Hiratani, 1996 .

Electron trapping characteristics and scalability of HfO2 as a trapping layer in SONOS-type flash memories

Digh Hisamoto, Kazuyoshi Torii, Toshiyuki Mine, 2008, 2008 IEEE International Reliability Physics Symposium.

Improvement of thermal stability of via resistance in dual damascene copper interconnection

Kenji Hinode, Kazuyoshi Torii, T. Oshima, 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

Silicon light-emitting transistor for on-chip optical interconnection

Nobuyuki Sugii, Digh Hisamoto, Kazuyoshi Torii, 2006 .

Rutile-type TiO2 thin film for high-k gate insulator

Yasuhiro Shimamoto, Hiroshi Miki, Toshihide Nabatame, 2003 .

Oxygen Vacancy Induced Substantial Threshold Voltage Shifts in the Hf-based High-K MISFET with p+poly-Si Gates -A Theoretical Approach

Kazuyoshi Torii, Kiyomi Nakajima, Kenji Shiraishi, 2004 .

Strain-Imaging Observation of Pb(Zr, Ti)O3 Thin Films

Kazuyoshi Torii, Keiji Takata, K. Torii, 1995 .

Strain-imaging observation of the polarization freezing of the domains under the electrode of a Pb(Zr, Ti)O3 film

Yoshihisa Fujisaki, Hiroshi Miki, Kazuyoshi Torii, 1999 .

Electrode‐induced degradation of Pb(ZrxTi1−x)O3 (PZT) polarization hysteresis characteristics in Pt/PZT/Pt ferroelectric thin‐film capacitors

Yoshihisa Fujisaki, Hiroshi Miki, Kazuyoshi Torii, 1996 .

Remote-charge-scattering limited mobility in field-effect transistors with SiO2 and Al2O3∕SiO2 gate stacks

Yasuhiro Shimamoto, Osamu Tonomura, Matty Caymax, 2005 .

Novel Laser Annealing Process for Advanced Complementary Metal Oxide Semiconductor Devices with Suppressed Polycrystalline Silicon Gate Depletion and Ultra shallow Junctions

Kazuyoshi Torii, Toshiyuki Mine, Akio Shima, 2007 .

Effective electron mobility reduced by remote charge scattering in high-κ gate stacks

Yasuhiro Shimamoto, Kazuyoshi Torii, Masahiko Hiratani, 2002 .