Chi-Hong Tung

Ideal Topographic Simulations for Null Measurement Data

Yan-Jen Su, Chi-Hong Tung, Leh-Rong Chang, 2008 .

A white-light profiling algorithm adopting the multiwavelength interferometric technique

Chi-Hong Tung, Calvin C. Chang, Hua-Chen Hsu, 2004, SPIE Optics + Photonics.

A hybrid phase unwrapping method for correction the error

Chi-Hong Tung, Calvin C. Chang, Yong-Tong Zou, 2007, SPIE Optical Engineering + Applications.

In-chip overlay measurement by existing bright-field imaging optical tools

Yi-Sha Ku, Chi-Hong Tung, Nigel Smith, 2005, SPIE Advanced Lithography.

Performance study of CD mark size for angular scatterometry

Nigel Smith, Sheng-Hua Lu, Yi-Sha Ku, 2005, SPIE Advanced Lithography.

Auto-scanning white-light interferometer

Jin-Liang Chen, Chi-Hong Tung, Calvin C. Chang, 2007, SPIE Optical Engineering + Applications.

Fast surface profiling using monochromatic phase and fringe order in white-light interferometry

Chi-Hong Tung, Calvin C. Chang, Chiung-Huei Huang, 2006, SPIE Optics + Photonics.

Improved thin film model for overlay metrology

Yi-Sha Ku, Chi-Hong Tung, Nigel Smith, 2005, SPIE Advanced Lithography.

In-chip overlay metrology

Yi-Sha Ku, L. Binns, Chi-Hong Tung, 2006, SPIE Advanced Lithography.