H. Goebel

Application of oxygen plasma processing to silicon direct bonding

Werner Langheinrich, O. Zucker, M. Kulozik, 1993 .

Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever

Michael Dr Ing Mettner, C. Doring, H.-P. Trah, 1993 .