H. Baumann

A Silicon Microvalve With Integrated Flow Sensor

J. Franz, H. Baumann, H. Trah, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever

Michael Dr Ing Mettner, C. Doring, H.-P. Trah, 1993 .