H. Glosch

An Open Foundry Concept for Microsystem Small Series Production: Concept and Examples

J. N. Burghartz, C. Harendt, H. Kueck, 2011 .

Micromachined inclinometer with high sensitivity and very good stability

Walter Lang, J. Frech, Hermann Sandmaier, 2002 .

Automatisiertes Messsystem für kleinste Volumenflüsse

H. Glosch, M. Freygang, J. Merz, 1995 .

Thermal flow sensor for liquids and gases based on combinations of two principles

Walter Lang, Hermann Sandmaier, H. Glosch, 1999 .

Thermal characterization of microsystems by means of high-resolution thermography

H. Glosch, K. Hiltmann, M. Ashauer, 1997 .

A thermoelectric converter for energy supply

Walter Lang, H. Glosch, M. Ashauer, 1999 .

Thermal flow sensor for liquids and gases

H. Glosch, W. Lang, F. Hedrich, 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

Convection-based micromachined inclinometer using SOI technology

J. Frech, H. Glosch, W. Lang, 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).