Ziad R. Hatab

Supersparse overlay sampling plans: an evaluation of methods and algorithms for optimizing overlay quality control and metrology tool throughput

Joseph C. Pellegrini, Ziad R. Hatab, Jeffrey M. Bush, 1999, Advanced Lithography.

16 MB DRAM trench depth characterization using dome scatterometry

John R. McNeil, Ziad R. Hatab, S. Sohail H. Naqvi, 1994 .

Developed photoresist metrology using scatterometry

John R. McNeil, Christopher J. Raymond, Ziad R. Hatab, 1994 .