F Bruno

Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength.

F Bruno, M D Guidice, R Recca, 1991, Applied optics.

Structural and optical properties of silicon oxynitride on silicon planar waveguides.

M. Valli, M. D. Giudice, F. Bruno, 1990, Applied optics.