J. H. Beberman

Modulated discharges: Effect on plasma parameters and deposition

Joseph T. Verdeyen, Lawrence J. Overzet, J. Verdeyen, 1990 .

Measurement of the Electron Density and the Attachment Rate Coefficient in Silane/helium Discharges

C. Fleddermann, J. Verdeyen, J. H. Beberman, 1985 .

Enhancement of the negative ion flux to surfaces from radio‐frequency processing discharges

J. Verdeyen, L. Overzet, J. H. Beberman, 1989 .

Damaged and damage‐free hydrogenation of GaAs: The effect of reactor geometry

N. Holonyak, M. Feng, K. Hsieh, 1988 .