S. Petitdidier
发表
L. Arnaud,
S. Chhun,
C. Besset,
2009,
2009 IEEE International Interconnect Technology Conference.
Manufacturability and Speed Performance Demonstration of Porous ULK (k=2.5) for a 45nm CMOS Platform
M. Haond,
P. Ferreira,
C. Cregut,
2007,
2007 IEEE Symposium on VLSI Technology.