Greg W. Starr

Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Greg W. Starr, E. Dan Hirleman, 1996, Optics & Photonics.

Light scattering from patterned surfaces and particles on surfaces

Greg W. Starr, E. Dan Hirleman, Brent M. Nebeker, 1995, Advanced Lithography.

Modeling of light scattering from structures with particle contaminants

Greg W. Starr, E. Dan Hirleman, Brent M. Nebeker, 1996, Optics & Photonics.

Prediction of light scattering characteristics of particles and structures on surfaces by the coupled-dipole method

Roland Schmehl, Greg W. Starr, E. Dan Hirleman, 1996, Advanced Lithography.

Azimuthal dependence of coherent light scatter from patterned surfaces

Greg W. Starr, E. Dan Hirleman, 1996, Advanced Lithography.

Defect characterization and light scattering by PSL spheres on tungsten CMP wafers

Greg W. Starr, E. Dan Hirleman, Ping Ding, 1997, Advanced Lithography.

Evaluation of iteration methods used when modeling scattering from features on surfaces using the discrete-dipole approximation

Greg W. Starr, Brent M. Nebeker, E. Dan Hirleman, 1998 .