P. E. Riley

发表

PLASMA ETCHING OF ALUMINUM FOR ULSI CIRCUITS

S. S. Peng, P. E. Riley, Leuh Fang, 1993 .

Study of etch rate characteristics of SF/sub 6//He plasmas by response-surface methodology: effects of interelectrode spacing

P. E. Riley, D. A. Hanson, D. Hanson, 1989 .

Advanced 'contact engineering' for submicron VLSI multilevel metallization

K. Young, K. Chiu, G. Ray, 1993 .

Synthesis and crystal structures of cycloheptatrienylidene complexes of iron

Raymond E. Davis, W. Jones, P. E. Riley, 1980 .

X-ray crystallographic characterization of a stepwise, metal-assisted oxidative decarboxylation: vanadium complexes of ethylenebis[(o-hydroxyphenyl)glycine] and derivatives

C. Carrano, V. Pecoraro, K. Raymond, 1986 .

Crystal structure at −35°C of carboxycobaltocenium hexafluorophosphate

Raymond E. Davis, P. E. Riley, 1978 .

X-Ray Crystallographic Characterization of a Stepwise, Metal-Assisted Oxidative Decarboxylation: Vanadium Complexes of Ethylenebis[(o-hydroxyphenyl)glycine] and Derivatives.

C. Carrano, V. Pecoraro, K. Raymond, 1986 .

Coordination chemistry of microbial iron transport compounds. 26. Dimeric dialkoxo-bridged iron(III) complexes of linear dihydroxamate ligands

K. Raymond, P. E. Riley, S. Barclay, 1984 .

Crystal and molecular structure of chloro(bis{2-[(2-pyridylmethyl)amino]ethyl} disulfide)nickel(II) perchlorate

K. Seff, P. E. Riley, 1972 .

Bis(2,6-dimethylpyridine)chromium. A .pi.-heterocyclic complex

J. Lagowski, R. E. Davis, P. E. Riley, 1976 .

Preparation of praseodymium(III) chloranilate and the crystal structures of Pr2(C6Cl2O4)3.8C2H5OH and Na3[C6H2O(OH)(SO3)2].H2O

K. Raymond, P. E. Riley, S. Haddad, 1983 .

Siderophilin metal coordination. III: Crystal structures of the cobalt(III), gallium(III), and copper(II) complexes of ethylenebis(O-hydroxyphenyl)glycine]

C. Carrano, V. Pecoraro, K. Raymond, 1983 .

An NMR spectroscopic and x-ray crystallographic study of the reaction of tris(dimethylamino)chlorosilane with aluminum chloride. A quest for the elusive silicenium cation

P. E. Riley, A. Cowley, M. Cushner, 1980 .

Synthesis, crystal structure, and chemical reactivity of octacarbonyl-.mu.-methylene-diiron

Raymond E. Davis, P. E. Riley, R. Pettit, 1980 .

Synthesis of cyclic hydrocarbons via intramolecular coupling of bis-pentadienyl iron tricarbonyl cations

Raymond E. Davis, P. E. Riley, R. Pettit, 1976 .

Crystal and molecular structure of the 1:2 aluminum trichloride-tetrahydrofuran complex AlCl3.2THF

Raymond E. Davis, P. E. Riley, A. Cowley, 1981 .

Crystal and molecular structure at −35°C of (π-cyclobutadiene)dicobalt hexacarbonyl

Raymond E. Davis, P. E. Riley, 1977 .

Crystal and molecular structure of (π-cyclopentadienyl)-(π-cyclobutadiene)cobalt

Raymond E. Davis, P. E. Riley, 1976 .

Crystal and molecular structures at -35.degree.C of two crystal forms of bis(2,6-dimethylpyridine)chromium, a bis heterocyclic sandwich complex

Raymond E. Davis, P. E. Riley, 1976 .

Crystal structure and low-temperature proton NMR spectrum of tetramesityldiphosphine. Evidence for the anticonformational preference in tetraaryldiphosphines

Raymond E. Davis, P. E. Riley, A. Cowley, 1981 .

Structure and bonding in neutral and cationic iron carbonyl phosphine complexes. The crystal structures of (.pi.-C8H6)Fe(CO)2(PPh3), [(.pi.-C5H5)Fe(CO)2(PPh3)]Cl.3H2O, and [(.pi.-C5H5)Fe(CO)(Ph2PCH2CH2PPh2)]BF4

Raymond E. Davis, P. E. Riley, 1983 .

Crystal structure at -35.degree.C of (.pi.-cyclopentadienyl)(bis(diphenylphosphine)ethane)(acetonitrile)iron tetraphenylborate and evidence for cationic iron-methylene complexes

Raymond E. Davis, P. E. Riley, R. Pettit, 1978 .

Ferric ion sequestering agents. 13. Synthesis, structures, and thermodynamics of complexation of cobalt(III) and iron(III) tris complexes of several chelating hydroxypyridinones

K. Raymond, P. E. Riley, D. White, 1985 .

Crystal structures at -35.degree.C of tetraphenylphosphonium (triphenylphosphine)tetracarbonylmanganate and (triphenylphosphine)tetracarbonyliron

Raymond E. Davis, P. E. Riley, 1980 .

Syntheses and crystal structures at -35.degree.C of bis(.eta.3-2-allyl)-1,2-ethanobis(tricarbonylcobalt) and bis(.eta.3-2-allyl)-1,3-propanonobis((trimethyl phosphite)dicarbonylcobalt)

Raymond E. Davis, P. E. Riley, R. Pettit, 1978 .

Structures of and bonding in .eta.1-cycloheptatrienylidene complexes of iron

Raymond E. Davis, W. Jones, P. E. Riley, 1982 .

Coordination chemistry of microbial iron transport compounds. 25. Proton-dependent cobalt(III) spin states. Structure of the sodium salt of trans-tris(benzohydroximato)cobaltate(III)

K. Raymond, P. E. Riley, S. Barclay, 1983 .

Crystallographic evidence for hydrolysis in zeolites. Structure of hydrated partially cobalt(II)-exchanged zeolite A

K. Seff, P. E. Riley, 1975 .

Crystal and molecular structure of a 1:2 cyclobutadiene iron tricarbonyl-dimethyl maleate photoadduct

Raymond E. Davis, P. E. Riley, 1975 .

Characterization of a Spin‐Applied Dielectric for Use in Multilevel Metallization

A. Shelley, P. E. Riley, 1988 .

Implementation of tungsten metallization in multilevel interconnection technologies

P. E. Riley, T. E. Clark, E. F. Gleason, 1990 .

Crystal structures of dehydrated partially cobalt(II)-exchanged zeolite A and of its carbon monoxide adduct

K. Seff, P. E. Riley, 1974 .

Crystal structure of an ethylene sorption complex of partially cobalt(II)-exchanged zeolite A

K. Seff, P. E. Riley, K. Kunz, 1975 .

Crystal structures at -35.degree.C of the unsubstituted and substituted bridging methylene complexes Fe2(CO)8(.mu.-CH2) and [(.eta.5-C5H5)Fe(CO)]2(.mu.-CO)(.mu.-CHCH3)

Raymond E. Davis, P. E. Riley, B. B. Meyer, 1981 .

SPECIFIC SEQUESTERING AGENTS FOR THE ACTINIDES. 9. SYNTHESIS OF METAL COMPLEXES OF 1-HYDROXY-2(1H)-PYRIDINONE AND THE CRYSTAL STRUCTURE OF TETRAKIS (l-HYDROXY-2 (1H) -PYRIDINONE) AQUOTHORIUM(IV) DIHYDRATE.

K. Raymond, P. E. Riley, K. Abu-Dari, 1983 .

Planarization of dielectric layers for multilevel metallization

P. E. Riley, E. Castel, 1988 .

Development of a magnetron-enhanced plasma process for tungsten etchback with response-surface methodology

P. E. Riley, A. Mak, S. Ghanayem, 1990 .

Integrated deposition and etchback of tungsten in a multi-chamber, single-wafer system

P. E. Riley, C. Leung, A. Mak, 1990, Seventh International IEEE Conference on VLSI Multilevel Interconnection.

Composite metal etching for submicron integrated circuits

R. Kavari, P. E. Riley, M. Ben-tzur, 1995 .

Plasma Etching of Aluminum Metallizations for Ultralarge Scale Integrated Circuits

P. E. Riley, 1993 .

Comparison of etch rates of silicon nitride, silicon dioxide, and polycrystalline silicon upon O2 dilution of CF4 plasmas

P. E. Riley, D. Hanson, 1989 .

Reactor characterization for a process to etch Si/sub 3/N/sub 4/ formed on thin SiO/sub 2/

P. E. Riley, D. Figueredo, B. N. Defonseka, 1993 .

Development of a Multistep SiO2 Plasma Etching Process in a Minibatch Reactor Using Response‐Surface Methodology

Paul E. Riley, Alfred P. Turley, Witold J. Malkowski, 1989 .

Crystal structures of hydrated and dehydrated thallium-exchanged zeolite A

D. Shoemaker, K. Seff, P. E. Riley, 1972 .

Development of a Highly Uniform Silicon Dioxide Etching Process Using Response‐Surface Methodology

P. E. Riley, 1986 .