Toralf Scharf

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques.

Reinhard Voelkel, Wilfried Noell, Jeremy Béguelin, 2020, Applied optics.

Measuring amplitude and phase of light emerging from microstructures with HRIM

Myun-Sik Kim, Hans Peter Herzig, Toralf Scharf, 2011, Optical Metrology.

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography.

Reinhard Voelkel, Carsten Rockstuhl, Chen Yan, 2019, Optics express.

Leveraging wafer-level manufacturing process limitations to increase large-scale fused silica microlens array uniformity

Reinhard Voelkel, Wilfried Noell, Raoul Kirner, 2019, Optical Engineering + Applications.

Specification of aspherical surfaces used as refractive elements in micro-optical systems

Reinhard Voelkel, Wilfried Noell, Jeremy Béguelin, 2019, Optical Engineering + Applications.

Adjoint method and inverse design for diffractive beam splitters

Toralf Scharf, Andreas Hermerschmidt, Dong Cheon Kim, 2020, LASE.