Takahiro Yogi

Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO3/Pt/³-Al2O3/Si structure

Makoto Ishida, Kazuaki Sawada, Daisuke Akai, 2011, International Solid-State Sensors, Actuators and Microsystems Conference.