Rostyslav Mastylo

发表

A focus sensor for an application in a nanopositioning and nanomeasuring machine

Eberhard Manske, Rostyslav Mastylo, Denis Dontsov, 2005, SPIE Optical Metrology.

Precision mechatronics based on high-precision measuring and positioning systems and machines

Tino Hausotte, Eberhard Manske, Norbert Hofmann, 2007, SPIE Optical Metrology.

Multi-component force measurement in micromachining

Eberhard Manske, Jan Schleichert, Ilko Rahneberg, 2017 .

Integration of probe systems in a nanopositioning and nanomeasuring machine

Tino Hausotte, Eberhard Manske, Rostyslav Mastylo, 2005, Other Conferences.

Transfer characteristics of optical profilers with respect to rectangular edge and step height measurement

Peter Lehmann, Eberhard Manske, Weichang Xie, 2017, Optical Metrology.

A compact tactile surface profiler for multi-sensor applications in nano measuring machines

Eberhard Manske, René Theska, Rostyslav Mastylo, 2014 .

Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate

Stefan Sinzinger, Martin Hoffmann, Eberhard Manske, 2019, Advanced Lithography.

Ein kompakter Tastschnittsensor als Teil eines Multi-Sensor-Systems für Nanomessmaschinen

Eberhard Manske, René Theska, Norbert Hofmann, 2015 .

Nanomeasuring and nanopositioning engineering

Tino Hausotte, Eberhard Manske, Rostyslav Mastylo, 2010 .

Numerical investigations of the potential for laser focus sensors in micrometrology

Eberhard Manske, Rostyslav Mastylo, Jörg Bischoff, 2017, Optical Metrology.

Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology

Tino Hausotte, Eberhard Manske, Rostyslav Mastylo, 2006, SPIE Advanced Lithography.

Entwicklung eines Fokussensors und Integration in die Nanopositionier- und Nanomessmaschine (Development of a Focus Sensor and its Integration into the Nanopositioning and Nanomeasuring Machine)

Eberhard Manske, Rostyslav Mastylo, Gerd Jäger, 2004 .

Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine

Tino Hausotte, Eberhard Manske, Rostyslav Mastylo, 2008 .

New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

Tino Hausotte, Eberhard Manske, T. Machleidt, 2007 .

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

Tino Hausotte, Eberhard Manske, Rostyslav Mastylo, 2006 .

Investigation of position detectors for atomic force microscopes

Eberhard Manske, Rostyslav Mastylo, Nataliya Vorbringer-Dorozhovets, 2018, Measurement Science and Technology.