Torsten Feigl

发表

Igor A. Artyukov, Yegor Bugayev, Oleksandr Yu. Devizenko, 2005, SPIE Optics + Photonics.
Boris N. Chichkov, Torsten Feigl, Ulf Hinze, 2008, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, 2002, SPIE Optics + Photonics.
Torsten Feigl, Minghong Yang, Norbert Kaiser, 2005, SPIE Laser Damage.
Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2012, Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, 2001, Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).
Tino Benkenstein, Torsten Feigl, Norbert Kaiser, 2006, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2005, SPIE Optical Systems Design.
Andreas Tünnermann, Torsten Feigl, Angela Duparré, 2008, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Nicolas Benoit, 2006, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2005, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2005, SPIE/COS Photonics Asia.
Torsten Feigl, Norbert Kaiser, Roland Thielsch, 2000, Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2004, SPIE Optics + Photonics.
Torsten Feigl, Sven Schröder, Angela Duparré, 2011, Optical Systems Design.
Gunther Notni, Torsten Feigl, Angela Duparre, 1998, Optics & Photonics.
Andreas Tünnermann, Torsten Feigl, Norbert Kaiser, 2013, Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, 2003, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Klaus R. Mann, 2005, SPIE Optical Systems Design.
Torsten Feigl, Frank Barkusky, Klaus Mann, 2013, Europe Optics + Optoelectronics.
Hans Willy Becker, Torsten Feigl, Norbert Kaiser, 2002, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2005, SPIE Optical Systems Design.
Torsten Feigl, Norbert Kaiser, Boris Tkachenko, 2011, Optics + Optoelectronics.
Torsten Feigl, Sergiy Yulin, Norbert Kaiser, 2006, SPIE Optics + Photonics.
Torsten Feigl, Angela Duparré, Marcus Trost, 2011, Advanced Lithography.
Torsten Feigl, Sergiy Yulin, Norbert Kaiser, 2007, SPIE Optical Engineering + Applications.
Uwe Zeitner, Torsten Feigl, Robert Leitel, 2015, Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Igor V. Fomenkov, 2008, Optical Engineering + Applications.
Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, 2001, SPIE Optics + Photonics.
Torsten Feigl, Mark van de Kerkhof, Uwe Zeitner, 2018, Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergey Yulin, 2000, SPIE Optics + Photonics.
Torsten Feigl, Norbert Kaiser, Helmut Bernitzki, 2002, SPIE Advanced Lithography.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2004, SPIE Optics + Photonics.
Torsten Feigl, Udo Schühle, Luca Teriaca, 2018, Astronomical Telescopes + Instrumentation.
Hans Willy Becker, Torsten Feigl, Norbert Kaiser, 2002, Photomask Technology.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2003, SPIE Optics + Photonics.
Torsten Feigl, Norbert Kaiser, Boris Tkachenko, 2010, Advanced Lithography.
Torsten Feigl, Steffen Wilbrandt, Olaf Stenzel, 2012, Other Conferences.
Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, 2002, SPIE Optics + Photonics.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2008, Optical Systems Design.
Torsten Feigl, Ming Fang, Manish Chandhok, 2008, SPIE Advanced Lithography.
Torsten Feigl, Vicky Philipsen, Philipp Naujok, 2021, Photomask Technology.
Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2011, Applied optics.
Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2007, Optics express.
Torsten Feigl, Robert Jung, Holger Stiel, 2018, Microscopy and Microanalysis.
Torsten Feigl, Norbert Kaiser, Sergiy Yulin, 2005 .
Torsten Feigl, Norbert Kaiser, V. V. Kondratenko, 2008 .
Andrzej Bartnik, Henryk Fiedorowicz, Torsten Feigl, 2012 .
Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2013, Optics express.
Torsten Feigl, Norbert Kaiser, Sergey Yulin, 2002, Applied optics.