J. Joo

发表

Characterization of a Magnetron Sputtering Cathode by a 3D Particle Model

J. Joo, 2008 .

Plasma conditions for the deposition of TiN by biased activated reactive evaporation and dependence of the resistivity on preferred orientation

B. Hahn, J. Joo, J. Jun, 1987 .

Characterization of Gas Distribution Effect in Inductively Coupled Plasma System

Junghoon Joo, J. Joo, 2013 .

The properties of (Ti,Al)N coatings deposited by inductively coupled plasma assisted d.c. magnetron sputtering

Hyun-Seo Park, Jung-Joong Lee, J. Joo, 2001 .

Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2

S. Rossnagel, Junghoon Joo, Steve. M. Rossnagel, 2009 .

Development of a Plasma Training Lab kart: System Setup and Numerical Simulation

J. Joo, 2017 .

Etching characteristics of photoresist and low-k dielectrics by Ar/O2 ferrite-core inductively coupled plasmas

C. Chung, Young‐Chang Joo, Hyoun-woo Kim, 2008 .

Adhesion properties of TiB2 coatings on nitrided AISI H13 steel

Jung-Joong Lee, J. Joo, Dong-Ha Jung, 2005 .

The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition

Dukho Lee, Hyunseung Lee, J. Joo, 2005 .

Process control for low temperature reactive deposition of Al doped ZnO films by ICP-assisted DC magnetron sputtering

J. J. Lee, J. Joo, B. Koo, 2005 .

Low temperature deposition of Al-doped zinc oxide films by ICP-assisted reactive DC magnetron sputtering

J. J. Lee, Yeonghun Han, J. Joo, 2005 .

Preparation of TiN films at room temperature by inductively coupled plasma assisted chemical vapor deposition

Jung-Joong Lee, J. Joo, Dong-kak Lee, 2003 .

Mechanical properties of titanium nitride coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering

J. Lim, Taesoon Park, Jung-Joong Lee, 2000 .

Study of chromium and chromium nitride coatings deposited by inductively coupled plasma-assisted evaporation

J. J. Lee, J. Joo, S. Jung, 2003 .

The effects of impurity and temperature for transparent conducting oxide properties of Al:ZnO deposited by dc magnetron sputtering

S. Rossnagel, J. Joo, Wonkyun Yang, 2012 .

Low temperature TiN deposition by ICP-assisted chemical vapor deposition

Jung-Joong Lee, J. Joo, Dong-kak Lee, 2003 .

Heat Transfer Analysis of a Pulse Magnetron Sputtering Cathode

J. Joo, 2008 .

Failure Analysis of Filaments of Quadrupole Mass Spectrometer for Plasma Process Monitoring

Dong Hoon Kim, J. Joo, S. Ha, 2015 .

Application of inductively coupled plasma to super-hard and decorative coatings

Jung-Joong Lee, J. Joo, 2003 .

Mechanical properties of (Ti, Cr)N coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering

J. J. Lee, J. Lim, Hyun-Seo Park, 2003 .

Deposition of Ti–B–N films by ICP assisted sputtering

J. J. Lee, Hyun-Young Kim, J. Joo, 2003 .

Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems

J. Joo, 2009 .

Effect of electrode spacing on the density distributions of electrons, ions, and metastable and radical molecules in SiH4/NH3/N2/He capacitively coupled plasmas

J. Joo, H. J. Kim, Wonkyun Yang, 2015 .

Two step microwave plasma carbonization including low plasma power pre-carbonization for polyacrylonitrile based carbon fiber

S. Jo, Sungho Lee, Hun-Su Lee, 2015 .

Modulated Pulse Power Sputtering Technology for Deposition of Al Doped ZnO Thin Film

J. Joo, Wonkyun Yang, 2012 .

Ionization enhancement in ionized magnetron sputter deposition

J. Joo, 2000 .

Electrical resistivity change in Al:ZnO thin films dynamically deposited by bipolar pulsed direct-current sputtering and a remote plasma source

J. Joo, Wonkyun Yang, 2010 .

A Study of Discharge Shape Changes by Magnet Arrangements in a Magnetron Cathode

J. Joo, Jungeun Jee, 2008 .

Resistivity improvement of Al-doped ZnO film by bipolar pulsed dc magnetron sputtering with high Ar flow rate

J. Joo, Wonkyun Yang, 2012 .

Deposition of MgO films by ICP assisted evaporation

Yeonghun Han, S. Jung, J. Joo, 2003 .

Process Diagnosis of Reactive Deposition of MgO by ICP Sputtering System

J. Joo, 2012 .

Bipolar Pulse Bias Effects on the Properties of MgO Reactively Deposited by Inductively Coupled Plasma-Assisted Magnetron Sputtering

J. Joo, 2014 .

Plasma Uniformity Numerical Modeling of Geometrical Structure for 450 mm Wafer Process System

J. Joo, Wonkyun Yang, 2010 .

Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet

J. Joo, Wonkyun Yang, 2014 .

Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge

Ki-Bum Kim, D. Kang, J. Joo, 2004 .

Synthesis of TiO2 films by ICP-assisted DC magnetron sputtering

Jung-Joong Lee, J. Joo, Girak Lee, 2003 .

Low-temperature polysilicon deposition by ionized magnetron sputtering

J. Joo, 2000 .

Effects of the axial external magnetic field on the reduction of the dielectric window damage due to capacitive coupling in the inductively coupled plasma

K. Whang, Ho‐Jun Lee, J. Joo, 1997 .

Heat Transfer Analysis in ICP Assisted Bipolar Pulsed DC Magnetron Sputtering

J. Joo, Wonkyun Yang, 2009 .

Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED

Seung-Ho Lee, J. Joo, Wonkyun Yang, 2010 .

PLASMA DIAGNOSTICS OF MAGNETIC FIELD ASSISTED IONIZED MAGNETRON SPUTTERING

J. Joo, 1999 .

Across-wafer nonuniformity of long throw sputter deposition

A. Mayo, S. Hamaguchi, S. Rossnagel, 1997 .

Numerical Modeling of Floating Electrodes in a Plasma Processing System

J. Joo, 2015 .

Numerical modeling of SiH4 discharge for Si thin film deposition for thin film transistor and solar cells

J. Joo, 2011 .

Numerical Modeling of Very High Frequency Multi Hollow Cathode PECVD

J. Joo, 2010 .

Numerical studies on PACVD processes used for TiN multifunctional films using metal organic precursors

K. Yi, K. Rie, J. Joo, 2008 .

The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition

J. J. Lee, H. S. Kim, K. Yoo, 2005 .

A study on the low temperature coating process by inductively coupled plasma assisted DC magnetron sputtering

Hyun-Seo Park, J. Joo, H. Na, 2003 .

Enhancement Of Ionization In Ionized PVD By RF Pulsing And Magnetic Field

J. Joo, 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

Effects of pulsed sputtering frequency on the uniformity of Al:ZnO's transparent conductive oxide properties for solar cell applications

J. Joo, Wonkyun Yang, 2009 .

Plasma Uniformity Analysis of Inductively Coupled Plasma Assisted Magnetron Sputtering by a 2D Voltage Probe Array

J. Joo, 2014 .

Anti-corrosion Properties of CrN Thin Films Deposited by Inductively Coupled Plasma Assisted Sputter Sublimation for PEMFC Bipolar Plates

J. Joo, Young-Tae You, 2013 .

High Rate Deposition System by Inductively Coupled Plasma Assisted Sputter-sublimation

J. Joo, Jihoon Choi, 2012 .

Numerical Simulation: Effects of Gas Flow and Rf Current Direction on Plasma Uniformity in an ICP Dry Etcher

J. Joo, 2017 .

Numerical Modeling of Deposition Uniformity in ICP-CVD System

J. Joo, 2008 .

Interfacial Perpendicular Magnetic Anisotropy in Magnetic Tunnel Junctions Comprising CoFeB with FeNiSiB Layers

Y. K. Kim, Minhyeok Lee, Do Kyun Kim, 2019, Electronic Materials Letters.

Effects of electron beam patterns on melting and refining of silicon for photovoltaic applications

B. Jang, W. Yoon, Sunho Choi, 2011 .

Selective SiO2/Si3N4 etching in magnetized inductively coupled C4F8 plasma

Joong-Kyun Kim, K. Whang, Ho‐Jun Lee, 1998 .

A Study on the Carbonization and Strengthening of PAN Fiber by Microwave Plasma

Hun-Su Lee, J. Joo, Jihoon Choi, 2012 .

Analysis of contaminated QMS, cleaning and restoration of functions

Dong Hoon Kim, J. Joo, 2015 .

In2O3 Thin Films Prepared on TiAlN Substrates Using a Triethylindium and Oxygen Mixture

Hyoun-woo Kim, W. Cho, S. Hwang, 2007 .