U. Sridharan
发表
P. Davidovits,
U. Sridharan,
T. Digiuseppe,
1978
.
A. Das,
U. Sridharan,
R. Chakravarthy,
2016
.
F. Kaufman,
U. Sridharan,
B. Reimann,
1980
.
L. Qiu,
F. Kaufman,
U. Sridharan,
1981
.
F. Kaufman,
U. Sridharan,
F. Klein,
1985
.
P. Davidovits,
U. Sridharan,
T. Digiuseppe,
1979
.
P. Davidovits,
U. Sridharan,
D. L. Mcfadden,
1976
.
U. Sridharan,
D. L. Mcfadden,
1975
.
F. Kaufman,
U. Sridharan,
1983
.
L. Qiu,
F. Kaufman,
U. Sridharan,
1984
.
L. Qiu,
F. Kaufman,
U. Sridharan,
1982
.
A. Das,
U. Sridharan,
R. Chakravarthy,
2016
.
Low temperature etch chuck: Modeling and experimental results of heat transfer and wafer temperature
U. C. Sridharan,
M. Kent,
D. R. Wright,
1992
.