Mehrdad M. Moslehi

发表

Rapid Thermal Growth Of Thin Insulators On Si (Invited)

Mehrdad M. Moslehi, Krishna C. Saraswat, Steven C. Shatas, 1986, Photonics West - Lasers and Applications in Science and Engineering.

Mehrzonale illuminator with recessed sensors for control of the process

Mehrdad M. Moslehi, Robert T. Matthews, Cecil J. Davis, 1993 .

Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs

Charles D. Schaper, Mehrdad M. Moslehi, Krishna C. Saraswat, 1994 .

Noninvasive sensors for in-situ process monitoring and control in advanced microelectronics manufacturing

Mehrdad M. Moslehi, 1991, Other Conferences.

Control of MMST RTP: repeatability, uniformity, and integration for flexible manufacturing [ICs]

Mehrdad M. Moslehi, Krishna C. Saraswat, Thomas Kailath, 1994 .

Technique d'interconnection multi-niveaux à basse valeur RC pour circuits intégrés à haute performance

Mehrdad M. Moslehi, 1992 .

Pyrometer modeling for rapid thermal processing

Mehrdad M. Moslehi, Krishna C. Saraswat, S. C. Wood, 1991, Other Conferences.

RTP for advanced CMOS process integration

Mehrdad M. Moslehi, Rhett B. Jucha, John Kuehne, 1992, Other Conferences.

Rapid Thermal Multiprocessing For Micro Factories

Mehrdad M. Moslehi, Krishna C. Saraswat, David D. Grossman, 1990, Other Conferences.

Single-wafer integrated semiconductor device processing

Habib N. Najm, Mehrdad M. Moslehi, Richard A. Chapman, 1992 .

Low-temperature in-situ dry cleaning process for epitaxial layer multiprocessing

Mehrdad M. Moslehi, 1991, Other Conferences.

Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California

Mehrdad M. Moslehi, Dim-Lee Kwong, Rajendra P. Singh, 1992 .

Modeling, Identification, and Control of Rapid Thermal Processing Systems

Mehrdad M. Moslehi, Krishna C. Saraswat, Thomas Kailath, 1994 .

SINGLE-WAFER PROCESSING TOOLS FOR AGILE SEMICONDUCTOR PRODUCTION

Habib N. Najm, Mehrdad M. Moslehi, Ajit P. Paranjpe, 1994 .

Semiconductor Process Synthesis. Virtual Reactor and Recipe Synthesis Frameworks for Rapid Equipment and Process Development.

Mehrdad M. Moslehi, 1995 .

Single Wafer Rapid Thermal Multiprocessing

Mehrdad M. Moslehi, Krishna C. Saraswat, S. C. Wood, 1989 .

Rapid Thermal Nitridation of SiO2 for Nitroxide Thin Dielectrics

Mehrdad M. Moslehi, Krishna C. Saraswat, Steven C. Shatas, 1985 .

Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning

Mehrdad M. Moslehi, Krishna C. Saraswat, Ramnath Venkatraman, 1991 .

Fast-cycle-time single-wafer IC manufacturing

Habib N. Najm, Mehrdad M. Moslehi, Richard A. Chapman, 1994 .

Rapid Thermal Processing Requirements for 0.35-µm IC Technologies and Beyond

Mehrdad M. Moslehi, 1994 .

Rapid Thermal and Related Processing Techniques

Mehrdad M. Moslehi, Rajendra P. Singh, 1991 .

A Universal Thermal Module™ for Clusterable RTP and MOCVD Applications

Charles D. Schaper, Mehrdad M. Moslehi, Ahmad Kermani, 1995 .

Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor

Mehrdad M. Moslehi, Krishna C. Saraswat, S. C. Wood, 1991 .

Compositional Studies of Thermally Nitrided Silicon Dioxide (Nitroxide)

Mehrdad M. Moslehi, Krishna C. Saraswat, Steven C. Shatas, 1985 .

Advanced epitaxial Si and Ge x Si 1− x multiprocessing for semiconductor device technologies

Mehrdad M. Moslehi, Cecil J. Davis, M. Moslehi, 1990 .

Time‐dependent compositional variation in SiO2 films nitrided in ammonia

Mehrdad M. Moslehi, Krishna C. Saraswat, C. R. Helms, 1985 .

Electrical Characteristics of Devices Fabricated with Ultra-Thin Thermally Grown Silicon Nitride and Nitroxide Gate Insulators

Mehrdad M. Moslehi, Krishna C. Saraswat, 1983, 1983 Symposium on VLSI Technology. Digest of Technical Papers.