S. Takahashi

Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection

Y. Takaya, K. Takamasu, T. Miyoshi, 2005 .

On the use of titanium nitride as structural material for nano-electro-mechanical systems (NEMS)

G. Barbastathis, G. Nielson, H. Tuller, 2005, 5th IEEE Conference on Nanotechnology, 2005..

Recent developments in multilayer piezoelectric ceramic actuators and their applications

S. Takahashi, S. Takahashi, 1989 .