C. Stadelhoff
发表
R. Macdonald,
H. Rinneberg,
D. Grosenick,
2008
.
Jena,
Belgium,
H Germany,
2021,
Optics Express.
B. Beckhoff,
J. Weser,
Y. Kayser,
2023,
Metrologia.
Andreas Fischer,
Frank Scholze,
Christian Buchholz,
2010,
Advanced Lithography.
Christian Buchholz,
Frank Scholze,
Victor Soltwisch,
2016,
SPIE Advanced Lithography.