D. Stein

发表

USING SMART DUMMY FILL AND SELECTIVE REVERSE ETCHBACK FOR PATTERN DENSITY EQUALIZATION

Duane S. Boning, Brian Lee, David J. Stein, 2000 .

Contact angle measurement and its application to sol-gel processing

S. Haereid, D. Stein, D. Smith, 1994 .

In Situ Electrochemical Investigation of Tungsten Electrochemical Behavior during Chemical Mechanical Polishing

D. Hetherington, D. Stein, T. Guilinger, 1998 .

Preparation of low-density xerogels at ambient pressure

Douglas M. Smith, W. C. Ackerman, D. Stein, 1995 .

Investigation of the Kinetics of Tungsten Chemical Mechanical Polishing in Potassium Iodate‐Based Slurries: II. Roles of Colloid Species and Slurry Chemistry

David J. Stein, Dale L. Hetherington, D. Hetherington, 1999 .

Optical interferometry for surface measurements of CMP pads

M. Dugger, D. Hetherington, D. Stein, 1996 .

Deformation of aerogels during characterization

G. Scherer, Douglas M. Smith, D. Stein, 1995 .

Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms

D. Hetherington, D. Stein, J. Cecchi, 1999 .

Investigation of the Kinetics of Tungsten Chemical Mechanical Polishing in Potassium Iodate‐Based Slurries: I. Role of Alumina and Potassium lodate

David J. Stein, Dale L. Hetherington, D. Hetherington, 1999 .

High voltage with Si series photovoltaics

Alex Hsia, David J. Stein, R. D. Nasby, 2006, SPIE Optics + Photonics.

High voltage series connected Si photovoltaic cells

Alex Hsia, David J. Stein, R. D. Nasby, 2005, SPIE Optics + Photonics.