X. Hao

Selective electrochemical etching of cantilever-type SOI-MEMS devices

Peiling He, X. Hao, Xin Li, 2022, Nanotechnology and Precision Engineering.

An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

Hidekuni Takao, Kazusuke Maenaka, Yonggang Jiang, 2012, Sensors.

Fabrication of NdFeB microstructures using a silicon molding technique for NdFeB/Ta multilayered films and NdFeB magnetic powder

Takayuki Fujita, Kazusuke Maenaka, Yonggang Jiang, 2011 .

Formation Mechanism of a Silicon-on-Nothing Structure Using the Level-Set Approach and Molecular Dynamics

Peiling He, Jiawei Wang, X. Hao, 2021, Materials Today Communications.

Discovery during Hydrogen Annealing: Formation of Nanoscale Fluorocarbon Tubular Structures

K. Maenaka, K. Higuchi, X. Hao, 2013 .

Application of Silicon on Nothing Structure for Developing a Novel Capacitive Absolute Pressure Sensor

Hidekuni Takao, Kazusuke Maenaka, Koichi Sudoh, 2014, IEEE Sensors Journal.

An analytical thermal-structural model of a gas-sealed capacitive pressure sensor with a mechanical temperature compensation structure

Hidekuni Takao, Kazusuke Maenaka, Kohei Higuchi, 2014 .