A. D. Bakun

Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices

E. E. Gusev, D. M. Migunov, N. A. Dyuzhev, 2017, Nanotechnologies in Russia.

Method of formation of super-smooth optical surfaces using GCIB and ANAB processing

N. Kargin, A. D. Bakun, A. Gusev, 2020 .

Reactive ion etching of silicon using low-power plasma etcher

A. D. Bakun, Y. Voronov, D. Veselov, 2016 .