P. Leung

Characterization of a‐SiC:H films produced in a standard plasma enhanced chemical vapor deposition system for x‐ray mask application

H. Pépin, J. Kieffer, M. Chaker, 1992 .

SiC membranes for x‐ray masks produced by laser ablation deposition

H. Pépin, J. Kieffer, M. Chaker, 1991 .

Conduction Mechanisms of Ta/Porous SiCOH Films under Electrical Bias

T. Spooner, M. He, T. Lu, 2008 .

Plasma‐Enhanced Chemical Vapor Deposition of Silicon Dioxide Using Tetraethylorthosilicate (TEOS)

P. Leung, J. Mercier, I. Emesh, 1989 .

Plasma‐Enhanced Chemical Vapor Deposition of Silicon Dioxide Using Tetraethylorthosilicate (TEOS).

P. Leung, J. Mercier, I. Emesh, 1990 .