L. Mage

A systematic approach for thermal stability predictions of chemicals and their risk assessment: Pattern recognition and compounds classification based on thermal decomposition curves

Nadia Baati, Annik Nanchen, Francis Stoessel, 2017 .

Growth processes of dielectric thin films in a multipolar microwave plasma excited by distributed electron cyclotron resonance using tetraethylorthosilicate (TEOS) and oxygen precursors

M. Latreche, Y. Segui, P. Raynaud, 1996 .

Structural Transformation in PECVD Ultralow-k Material during Porogen Removal by UV Assisted Thermal Curing

O. Gourhant, L. Favennec, V. Jousseaume, 2007 .

Effect of plasma treatments on ultra low-k material properties

C. Goldberg, K. Junker, A. Humbert, 2005 .

Extendibility of the PECVD Porogen Approach for ULK Materials

O. Gourhant, P. Gonon, L. Favennec, 2007 .