C. Alleaume

Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser

T. Kunze, J. Ziegler, J. Ziegler, 2020, Journal of Physics: Photonics.

Degradation and surfactant-aided regeneration of fluorinated anti-sticking mold treatments in UV nanoimprint lithography

J. Boussey, D. Truffier-Boutry, M. Zelsmann, 2010 .

Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography

J. Boussey, D. Truffier-Boutry, M. Zelsmann, 2009 .