J. Béguelin

Improvements on the uniformity of large-area microlens arrays in Fused Silica.

M. Eisner, W. Noell, R. Voelkel, 2019, Optics express.

Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization.

W. Noell, R. Voelkel, T. Scharf, 2020, Applied optics.

Correction of spherical surface measurements by confocal microscopy

W. Noell, R. Voelkel, T. Scharf, 2020, Measurement Science and Technology.

32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

Ming C. Wu, Tae Joon Seok, R. Muller, 2021 .

Commented review on refractive microlenses and microlens arrays metrology

Toralf Scharf, Reinhard Voelkel, Jeremy Béguelin, 2021, Journal of Optical Microsystems.

Assessing microlens quality based on 3D irradiance measurement at the focal spot area

Toralf Scharf, Wilfried Noell, Reinhard Voelkel, 2018, Photonics Europe.

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques.

Reinhard Voelkel, Wilfried Noell, Jeremy Béguelin, 2020, Applied optics.

Leveraging wafer-level manufacturing process limitations to increase large-scale fused silica microlens array uniformity

Reinhard Voelkel, Wilfried Noell, Raoul Kirner, 2019, Optical Engineering + Applications.