P. Hahmann

Cellector: A new software tool for the support of cell projection in combination with variable shape electron beam lithography for mask and direct write applications

H. Hartmann, R. Steinmetz, T. Waas, 1999 .

High resolution variable-shaped beam direct write

Lutz Bettin, Thomas Elster, Bernd Schnabel, 2007 .

High resolution patterning - Preparation of VSB systems for 22nm node capability

U. Weidenmueller, Monika Boettcher, Peter Hahmann, 2010 .