K. Aite

The Relationship between Intrinsic Stress of Silicon Nitride Films and Ion Generation in A 50 KHz RF Discharge

J. Holleman, R. Koekoek, J. Middelhoek, 1988 .

Novel low temperature RF plasma annealing using NH/sub 3/-N/sub 2/ gas mixture

J. Middelhoek, F. W. Ragay, K. Aite, 1990 .

Simulation, design and fabrication of large area implanted silicon two-dimensional position sensitive radiation detectors

J. Middelhoek, K. Aite, P. Hári, 1991 .