P. Kinney

Real time, in situ particle monitoring of the Applied Materials PI9200 ion implanter

B. Adibi, S. Leung, S. Moffatt, 1991 .

High throughput wafer defect monitor for integrated metrology applications in photolithography

Anand Gupta, Nagaraja Rao, Patrick D. Kinney, 2008, SPIE Advanced Lithography.

Microscopy and spectroscopy characterization of small defects on 200mm wafers

C. R. Brundle, Y. Uritsky, P. Kinney, 1998 .

Investigation of aerosol spatial distributions downstream of a critical orifice at low pressure

Benjamin Y. H. Liu, G. Bae, D. Pui, 1998 .

Inlet efficiency study for the TSI aerodynamic particle sizer

D. Pui, P. Kinney, 1995 .

Use of the Electrostatic Classification Method to Size 0.1 μm SRM Particles—A Feasibility Study

Nelson P. Bryner, David Y.H. Pui, Patrick D. Kinney, 1991, Journal of research of the National Institute of Standards and Technology.

Use of the Electrostatic Classification Method to Size 0. 1 Micrometer Srm Particles: A Feasibility Study

G. Mulholland, D. Pui, N. Bryner, 2019 .