D. Toh

High-throughput deterministic plasma etching using array-type plasma generator system.

Y. Sano, K. Yamauchi, S. Matsuyama, 2021, The Review of scientific instruments.

Chemical etching of silicon carbide in pure water by using platinum catalyst.

Y. Sano, K. Yamauchi, S. Matsuyama, 2017, Applied physics letters.

Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study

Y. Sano, K. Yamauchi, S. Matsuyama, 2018 .

Nondeteriorating Verwey Transition in 50 nm Thick Fe3O4 Films by Virtue of Atomically Flattened MgO Substrates: Implications for Magnetoresistive Devices

K. Yamauchi, Hidekazu Tanaka, A. Hattori, 2021, ACS Applied Nano Materials.

Catalyzed chemical polishing of SiO2 glasses in pure water.

Y. Sano, K. Yamauchi, S. Matsuyama, 2019, The Review of scientific instruments.

High surface laser-induced damage threshold of SrB4O7 single crystals under 266-nm (DUV) laser irradiation.

Yasunori Tanaka, K. Yamauchi, Y. Mori, 2020, Optics express.